ZnO and Cr doped ZnO nanoparticles were synthesized by chemical vapor synthesis (CVS) which is a modified chemical vapor deposition (CVD) process. The resulting powders consist of nanocrystalline particles and were characterized by X-ray diffraction (XRD), nitrogen adsorption (BET), transmission electron microscopy (TEM), energy dispersive X-ray analysis (EDX), element analysis, and extended X-ray absorption fine structure (EXAFS) spectroscopy. The grain size decreases with increasing dopant concentration. The lattice constants extracted by the Rietveld method from XRD data vary slightly with doping concentration. XRD and EXAFS data analysis show that the Chromium dopant atoms are incorporated into the wurtzite host lattice.

中文翻译：

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铬掺杂氧化锌纳米粒子的化学气相合成与表征

ZnO 和 Cr 掺杂的 ZnO 纳米颗粒通过化学气相合成 (CVS) 合成，化学气相合成 (CVS) 是一种改进的化学气相沉积 (CVD) 工艺。所得粉末由纳米晶体颗粒组成，并通过 X 射线衍射 (XRD)、氮吸附 (BET)、透射电子显微镜 (TEM)、能量色散 X 射线分析 (EDX)、元素分析和扩展 X 射线进行表征吸收精细结构（EXAFS）光谱。晶粒尺寸随着掺杂剂浓度的增加而减小。通过 Rietveld 方法从 XRD 数据中提取的晶格常数随掺杂浓度而略有不同。XRD 和 EXAFS 数据分析表明，铬掺杂剂原子结合到纤锌矿主晶格中。