We present a comprehensive study of a magnetic sensor system that benefits from a new technique to substantially increase the magnetoelastic coupling of surface acoustic waves (SAW). The device uses shear horizontal acoustic surface waves that are guided by a fused silica layer with an amorphous magnetostrictive FeCoSiB thin film on top. The velocity of these so-called Love waves follows the magnetoelastically-induced changes of the shear modulus according to the magnetic field present. The SAW sensor is operated in a delay line configuration at approximately 150 MHz and translates the magnetic field to a time delay and a related phase shift. The fundamentals of this sensor concept are motivated by magnetic and mechanical simulations. They are experimentally verified using customized low-noise readout electronics. With an extremely low magnetic noise level of ≈100 pT/[Formula: see text], a bandwidth of 50 kHz and a dynamic range of 120 dB, this magnetic field sensor system shows outstanding characteristics. A range of additional measures to further increase the sensitivity are investigated with simulations.

中文翻译：

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宽带低噪声爱波磁场传感器系统。

我们对磁传感器系统进行了全面的研究，该系统受益于一种新技术，可以大大增加表面声波（SAW）的磁弹性耦合。该设备使用剪切水平声表面波，该表面声波由熔融石英层引导，顶部有非晶磁致伸缩FeCoSiB薄膜。这些所谓的洛夫波的速度遵循磁弹性引起的剪切模量根据存在的磁场的变化。SAW传感器以大约150 MHz的延迟线配置运行，并将磁场转换为时间延迟和相关的相移。这种传感器概念的基本原理是由磁和机械仿真驱动的。使用定制的低噪声读出电子设备对它们进行了实验验证。该磁场传感器系统具有≈100pT / [公式：参见文本]的极低磁噪声水平，50 kHz的带宽和120 dB的动态范围，具有出色的特性。通过仿真研究了一系列进一步提高灵敏度的附加措施。